I am trying to perform a delaminated analysis for a thin film model using Ansys workbench. my thin film sixe is 3cm x 1cm x 5nm on a substrate which have size 5cm x 1 cm x 125 um. But I cannot mesh it(out of memory)due to the huge number of elements if I use a 3D element. If I model the thin film as a surface with thickness 5 nm, the result is seem to be incorrect. Could any one give me some suggestion to solve it?